Double-tank etch cell kit

Features


• 두 개의 chamber 가 연결된 실리콘 웨이퍼 산화피막 실험용 cell kit

• 각 chamber 에 장착된 Sapphire 웨이퍼가 빛을 이용하여 다공성 실리콘 형성

• 양 쪽에 장착된 Sapphire window 를 통해서 실리콘 기판에 빛이 조사(照射)되며, 실험에 따라 blind cover 로 한 쪽을 막을 수 있음.

• 응용

  • Fabrication of porous Si-membrane
  • Anodization of Si-wafer
  • Electro-polishing of Si-substrate
  • Electrodeposition of Si-substrate
  • Electrochemical characterization of Si-substrate

• Gas-tight

Product Type


Product typeCat. No.
AqueousB-A-MM_D_TANK_ETCH-2x15
OrganicB-O-MM_D_TANK_ETCH-2x15

Specifications


Nominal exposure area1 cm²
Max. electrolyte volume15 ml x 2
Min. electrolyte volume10 ml x 2
Recommended Si-wafer size25 x 25 mm
Pt wire CE
Dia.0.6 mm, length 250 mm
Pseudo REDia. 0.6 mm, length 30 mm
Cell materials
PEEK
O-Ring materials

FKM / EPDM (Aqueous)

FFKM (Organic)

Electrode plug diameter
6 mm

Components


• Chamber x 2

• Lid x 2

• Window holder x 2

• Sapphire window x 2

• Set of screws x 2

• Pillar x 2

• Plug x 2

• Pt CE  x 2

• Pseudo reference electrode x 2


Large etch cell kit

Features


• 단결정 실리콘 웨이퍼 상의 Nanocrystalline 다공성 실리콘 층 생성을 위한 전기화학적 etching cell kit

• 조립 매뉴얼 : 그림 참고

Product Type


Product typePart. No.
PTFE bodyB-A-L_ETCH-PTFE
PEEK bodyB-A-L_ETCH-PEEK

Specifications


Nominal exposure area8.6 cm²
Electrolyte volume15 ml
Min. sample size38 x 38 mm
Max. sample width45 mm
Pt spiral wire CEInner diameter1 mm
Outer diameter17 mm
No. of turns5
Wire diameter0.6 mm
Turn spacing1 mm
Total length of wire191 mm
- Long spiral 141 mm
- Long straight wire 50 mm
Cell materials
PTFE or PEEK

Components


• Cell base x 1

• Cell top x 1

• Set of screws x 1

• Pt CE x 1


Small etch cell kit

Features


• 단결정 실리콘 웨이퍼 상의 Nanocrystalline 다공성 실리콘 층 생성을 위한 전기화학적 etching cell kit

• 조립 매뉴얼 : 그림 참고

Product Type


Product typePart. No.
PTFE bodyB-A-S_ETCH-PTFE
PEEK bodyB-A-S_ETCH-PEEK

Specifications


Nominal exposure area0.21 cm²
Electrolyte volume2.2 ml
Min. sample size12 x 12 mm
Max. sample width31 mm
Pt spiral wire CEInner diameter1 mm
Outer diameter17 mm
No. of turns5
Wire diameter0.6 mm
Turn spacing1 mm
Total length of wire191 mm
- Long spiral 141 mm
- Long straight wire 50 mm
Cell materials
PTFE or PEEK

Components


• Cell base x 1

• Cell top x 1

• Set of screws x 1

• Pt CE x 1


Standard etch cell kit

Features


• 단결정 실리콘 웨이퍼 상의 Nanocrystalline 다공성 실리콘 층 생성을 위한 전기화학적 etching cell kit

• 조립 매뉴얼 : 그림 참고

Product Type


Product typePart. No.
PTFE bodyB-A-STD_ETCH-PTFE
PEEK bodyB-A-STD_ETCH-PEEK

Specifications


Nominal exposure area1.2 cm²
Electrolyte volume4.8 ml
Min. sample size20 x 20 mm
Max. sample width31 mm
Pt spiral wire CEInner diameter1 mm
Outer diameter17 mm
No. of turns5
Wire diameter0.6 mm
Turn spacing1 mm
Total length of wire191 mm
- Long spiral 141 mm
- Long straight wire 50 mm
Cell materials
PTFE or PEEK

Components


• Cell base x 1

• Cell top x 1

• Set of screws x 1

• Pt CE x 1